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For steady and better surface of silicon wafer,Researchers are paying more and more attentions on the structures of Grinding and Polishing. This paper introduces the technology of silicon substrate actuality. Mainly about the measure of decreasing wafer scrap. Analyzes the technology and development of the polishing and cleaning process of silicon wafer.<br /> 关键词：集成电路 硅片 减薄<br /> IC ; Silicon wafer ; Grinding ;</div> <div class="postmsg">正在找这方面的资料，下载下来看看，谢谢。</div> <div style="height200px;"></div> </div> </div> </div> </div></div> </div> <!--autocomment filter by maxnum--> <div class="ft_wp"> <div id="ft" class=" cl"> <div id="flk" > <p> <a href="http://wpa.qq.com/msgrd?V=3&Uin=20600600&Site=光电工程师社区&Menu=yes&from=discuz" target="_blank" title="QQ"><img src="static/image/common/site_qq.jpg" alt="QQ" /></a><span class="pipe">|</span><a href="http://m.oecr.com" >手机版</a><span class="pipe">|</span><a href="http://so.oecr.com" title="站内搜索" target="_blank" >搜索</a><span class="pipe">|</span><a href="http://www.focaloptics.com" title="主办单位：武汉焦点光学技术有限公司" target="_blank" >焦点光学</a><span class="pipe">|</span><a href="http://www.oecr.com" target="_blank">光电工程师社区</a> ( <a href="http://beian.miit.gov.cn/" target="_blank">鄂ICP备17021725号-1</a> <a href="http://www.beian.gov.cn/portal/registerSystemInfo?recordcode=42011102000821" target="_blank">鄂网安备42011102000821号</a> ) <span id="tcss"></span><script type="text/javascript" src="http://tcss.qq.com/ping.js?v=1eOg" charset="utf-8"></script><script type="text/javascript" reload="1">pgvMain({"discuzParams":{"r2":"1028778","ui":0,"rt":"plugin","pn":1,"qq":"000"},"extraParams":""});</script></p> <p class="xs0"> <span id="debuginfo"> Copyright 2015 光电工程师社区 版权所有 All Rights Reserved. </span> </p> </div> <div id="ftl" > <p>申明：本站为非盈利性公益个人网站，已关闭注册功能，本站所有内容均为网络收集整理，不代表本站立场。如您对某些内容有质疑或不快，请及时联系我们处理！ </p> </div> <div id="frt" > <div class="wp"> <p class="dd01"> © 2001-2022 <a href="http://www.oecr.com" target="_blank">光电工程师社区</a> 网站备案号：<a href="https://beian.miit.gov.cn/">鄂ICP备17021725号</a> 网站公安备案号：<a href="http://www.beian.gov.cn/portal/registerSystemInfo?recordcode=42011102000821">鄂42011102000821号</a> Powered by <a href="http://www.discuz.net" target="_blank">Discuz!</a> <em>X3.2</em> </p><p class="dd02">GMT+8, 2025-12-18 07:38 </p> </div> </div></div> </div> </div> <!--bottombg结束--> <!--<div id="scrolltop"> <span hidefocus="true"><a title="返回顶部" onclick="window.scrollTo('0','0')" class="scrolltopa" ><b>返回顶部</b></a></span> </div> --> <div id="scrolltop"> <span hidefocus="true"><a title="返回顶部" onclick="window.scrollTo('0','0')" class="scrolltopa" ><b>返回顶部</b></a></span> </div> <script type="text/javascript">_attachEvent(window, 'scroll', function () { showTopLink(); });checkBlind();</script> <div id="discuz_tips" style="display:none;"></div> <script type="text/javascript"> var tipsinfo = '1028778|X3.2|0.6||0||0|7|1766014709|7f1c40469c387ba94ad61f78710135f2|2'; </script> <script src="http://discuz.gtimg.cn/cloud/scripts/discuz_tips.js?v=1" type="text/javascript" charset="UTF-8"></script></body></html>